Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier
Bibliographic Information
- Title
- Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier
- Author
- Y.T.Song et al.
Journal
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- Jap. J. of Applied Physics 44・4A
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Jap. J. of Applied Physics 44・4A 129-133, 2005
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Details 詳細情報について
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- CRID
- 1010000781869870722
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- Article Type
- journal article
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- Data Source
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- KAKEN