Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier
書誌事項
- タイトル
- Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier
- 著者
- Y.T.Song et al.
収録刊行物
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- Jap. J. of Applied Physics 44・4A
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Jap. J. of Applied Physics 44・4A 129-133, 2005