Low Temperature Direct Bonding of PMMA for Polymer Microchips
Bibliographic Information
- Title
- Low Temperature Direct Bonding of PMMA for Polymer Microchips
- Author
- H.Shinohara, M.Ishizuka, J.Mizuno, S.Shoji
Journal
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- Asia-Pacific Conference of Transducers and Micro-Nano Technology
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Asia-Pacific Conference of Transducers and Micro-Nano Technology 2006
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Details 詳細情報について
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- CRID
- 1010000781869877906
-
- Article Type
- journal article
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- Data Source
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- KAKEN