Low Temperature Direct Bonding of PMMA for Polymer Microchips
書誌事項
- タイトル
- Low Temperature Direct Bonding of PMMA for Polymer Microchips
- 著者
- H.Shinohara, M.Ishizuka, J.Mizuno, S.Shoji
収録刊行物
-
- Asia-Pacific Conference of Transducers and Micro-Nano Technology
-
Asia-Pacific Conference of Transducers and Micro-Nano Technology 2006