Mechanical properties of single crystal Silicon Carbonate thin layer grown by Molecular Beam Epitaxy
Bibliographic Information
- Title
- Mechanical properties of single crystal Silicon Carbonate thin layer grown by Molecular Beam Epitaxy
- Author
- M.Kojima, N.Moronuki, A.Kakuta
Journal
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- Proc.Jap.Soc.Prec.Eng.2005(Autumn)
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Proc.Jap.Soc.Prec.Eng.2005(Autumn) 107-108, 2005
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Details 詳細情報について
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- CRID
- 1010000781870634383
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- Article Type
- journal article
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- Data Source
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- KAKEN