Design and fabrication of RESURF MOSFETs on 4H-SiC(0001), (11-20), and 6H-SiC(0001)
書誌事項
- タイトル
- Design and fabrication of RESURF MOSFETs on 4H-SiC(0001), (11-20), and 6H-SiC(0001)
- 著者
- T.Kimoto他
収録刊行物
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- IEEE Trans.Electron Devices 52
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IEEE Trans.Electron Devices 52 112-117, 2005