Design and fabrication of RESURF MOSFETs on 4H-SiC(0001), (11-20), and 6H-SiC(0001)
Bibliographic Information
- Title
- Design and fabrication of RESURF MOSFETs on 4H-SiC(0001), (11-20), and 6H-SiC(0001)
- Author
- T.Kimoto他
Journal
-
- IEEE Trans.Electron Devices 52
-
IEEE Trans.Electron Devices 52 112-117, 2005
