[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Dual-Axis Micro-Mechanical Probe for Independent Detection of Lateral and Vertical Forces

Bibliographic Information

Title
Dual-Axis Micro-Mechanical Probe for Independent Detection of Lateral and Vertical Forces
Author
K.Fukuzawa, S.Terada, M.Shikida, H.Amakawa, H.Zhang, Y.Mitsuya

Journal

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Details

  • CRID
    1010000781930221837
  • Article Type
    journal article
  • Data Source
    • KAKEN

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