Dual-Axis Micro-Mechanical Probe for Independent Detection of Lateral and Vertical Forces
書誌事項
- タイトル
- Dual-Axis Micro-Mechanical Probe for Independent Detection of Lateral and Vertical Forces
- 著者
- K.Fukuzawa, S.Terada, M.Shikida, H.Amakawa, H.Zhang, Y.Mitsuya
収録刊行物
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- Applied Physics Letters Vol. 89
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Applied Physics Letters Vol. 89 2006