Dual-Axis Micro-Mechanical Probe for Independent Detection of Lateral and Vertical Forces
Bibliographic Information
- Title
- Dual-Axis Micro-Mechanical Probe for Independent Detection of Lateral and Vertical Forces
- Author
- K.Fukuzawa, S.Terada, M.Shikida, H.Amakawa, H.Zhang, Y.Mitsuya
Journal
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- Applied Physics Letters Vol. 89
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Applied Physics Letters Vol. 89 2006
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Details 詳細情報について
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- CRID
- 1010000781930221837
-
- Article Type
- journal article
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- Data Source
-
- KAKEN