Depositions and Microstructure of Mg-Si Thin Film by Ion Beam Sputtering.
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- 近藤 勝義
- 大阪大学
書誌事項
- タイトル
- Depositions and Microstructure of Mg-Si Thin Film by Ion Beam Sputtering.
- 著者
- Katsuyoshi KONDOH
収録刊行物
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- Surface and Coatings Technology 200
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Surface and Coatings Technology 200 4233-4239, 2006