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Resistivity reduction of Cu interconnects
Bibliographic Information
- Title
- Resistivity reduction of Cu interconnects
- Author
- K. Ito, S. Tsukimoto, M. Moriyama and M. Murakami
Journal
-
- Stress-Induced Phenomena in Metallization, AIP Conference Proceedings 945
-
Stress-Induced Phenomena in Metallization, AIP Conference Proceedings 945 1-10, 2007
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Details 詳細情報について
-
- CRID
- 1010000781978587906
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN