Resistivity reduction of Cu interconnects
書誌事項
- タイトル
- Resistivity reduction of Cu interconnects
- 著者
- K. Ito, S. Tsukimoto, M. Moriyama and M. Murakami
収録刊行物
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- Stress-Induced Phenomena in Metallization, AIP Conference Proceedings 945
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Stress-Induced Phenomena in Metallization, AIP Conference Proceedings 945 1-10, 2007