Resistivity reduction of Cu interconnects
Bibliographic Information
- Title
- Resistivity reduction of Cu interconnects
- Author
- K. Ito, S. Tsukimoto, M. Moriyama and M. Murakami
Journal
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- Stress-Induced Phenomena in Metallization, AIP Conference Proceedings 945
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Stress-Induced Phenomena in Metallization, AIP Conference Proceedings 945 1-10, 2007
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Details 詳細情報について
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- CRID
- 1010000781978587906
-
- Article Type
- journal article
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- Data Source
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- KAKEN