[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Diagnostics of surface wave excited Kr/O2 plasma for low-temperature oxidation processes

Bibliographic Information

Title
Diagnostics of surface wave excited Kr/O2 plasma for low-temperature oxidation processes
Author
K. Takeda, Y. Matsumi, 他5名

Journal

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Details

  • CRID
    1010000781980285069
  • Article Type
    journal article
  • Data Source
    • KAKEN

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