Diagnostics of surface wave excited Kr/O2 plasma for low-temperature oxidation processes
書誌事項
- タイトル
- Diagnostics of surface wave excited Kr/O2 plasma for low-temperature oxidation processes
- 著者
- K. Takeda, Y. Matsumi, 他5名
収録刊行物
-
- Journal of Applied Physics 102
-
Journal of Applied Physics 102 13302-, 2007