Localized Etching of a Polyimide Film by an Atmospheric-Pressure Radio Frequency Microplasma Excited by a 100-μm-φ Metal Pipe Electrode
-
- 吉木 宏之
- 鶴岡工業高等専門学校
書誌事項
- タイトル
- Localized Etching of a Polyimide Film by an Atmospheric-Pressure Radio Frequency Microplasma Excited by a 100-μm-φ Metal Pipe Electrode
- 著者
- Hiroyuki Yoshiki
収録刊行物
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 49 2010