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Localized Etching of a Polyimide Film by an Atmospheric-Pressure Radio Frequency Microplasma Excited by a 100-μm-φ Metal Pipe Electrode
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- YOSHIKI Hiroyuki
- Tsuruoka National College of Technology
Bibliographic Information
- Title
- Localized Etching of a Polyimide Film by an Atmospheric-Pressure Radio Frequency Microplasma Excited by a 100-μm-φ Metal Pipe Electrode
- Author
- Hiroyuki Yoshiki
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 49 2010
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Details 詳細情報について
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- CRID
- 1010000782044348569
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- Article Type
- journal article
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- Data Source
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- KAKEN
