Localized Etching of a Polyimide Film by an Atmospheric-Pressure Radio Frequency Microplasma Excited by a 100-μm-φ Metal Pipe Electrode

Bibliographic Information

Title
Localized Etching of a Polyimide Film by an Atmospheric-Pressure Radio Frequency Microplasma Excited by a 100-μm-φ Metal Pipe Electrode
Author
Hiroyuki Yoshiki

Journal

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Details

  • CRID
    1010000782044348569
  • Article Type
    journal article
  • Data Source
    • KAKEN

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