Three-Dimensional Nano-Motion System for SPM-Based CMM, Journal of Advanced Mechanical Design
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- SAWANO Hiroshi
- 東京工業大学
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- YOSHIOKA Hayato
- 東京工業大学
Bibliographic Information
- Title
- Three-Dimensional Nano-Motion System for SPM-Based CMM, Journal of Advanced Mechanical Design
- Author
- Sawano Hiroshi, Gokan Toshimichi, Yoshioka Hayato, Shinno Hiden
Journal
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- Systems and Manufacturing
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Systems and Manufacturing Vol.4, No.6 1192-1200, 2010
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Details 詳細情報について
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- CRID
- 1010000782065917700
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- Article Type
- journal article
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- Data Source
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- KAKEN