Island formation of SiC film on striated Si(001) substrates
書誌事項
- タイトル
- Island formation of SiC film on striated Si(001) substrates
- 著者
- Yoshimine Kato and Kazuo Sakumoto
収録刊行物
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- Materials Science Forum
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Materials Science Forum Vol. 600-603 227-230, 2009