Island formation of SiC film on striated Si(001) substrates
Bibliographic Information
- Title
- Island formation of SiC film on striated Si(001) substrates
- Author
- Yoshimine Kato and Kazuo Sakumoto
Journal
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- Materials Science Forum
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Materials Science Forum Vol. 600-603 227-230, 2009
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Details 詳細情報について
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- CRID
- 1010000782081421188
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- Article Type
- journal article
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- Data Source
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- KAKEN