A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM
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- TAKAHASHI Satoru
- 東京大学
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- TAKAMASU Kiyoshi
- 東京大学
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- SATO Osamu
- 独立行政法人産業技術総合研究所
Bibliographic Information
- Title
- A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM
- Author
- Ping Yang, Shusaku Shibata, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
Journal
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- Key Engineering Materials
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Key Engineering Materials 447-448 590-594, 2010
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Details 詳細情報について
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- CRID
- 1010000782105499033
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- Article Type
- journal article
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- Data Source
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- KAKEN