Structural and Electrical Properties of Mg_2Si Thin Films Fabricated by Radio-Frequency Magnetron Sputtering Deposition
書誌事項
- タイトル
- Structural and Electrical Properties of Mg_2Si Thin Films Fabricated by Radio-Frequency Magnetron Sputtering Deposition
- 著者
- J. Tani and H. Kido
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詳細情報
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- CRID
- 1010000782121799044
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- 資料種別
- journal article
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- データソース種別
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- KAKEN