Structural and Electrical Properties of Mg_2Si Thin Films Fabricated by Radio-Frequency Magnetron Sputtering Deposition

Bibliographic Information

Title
Structural and Electrical Properties of Mg_2Si Thin Films Fabricated by Radio-Frequency Magnetron Sputtering Deposition
Author
J. Tani and H. Kido

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Details

  • CRID
    1010000782121799044
  • Article Type
    journal article
  • Data Source
    • KAKEN

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