Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams
書誌事項
- タイトル
- Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams
- 著者
- M. Tagawa, K. Yokota, C. Sogo, A. Yoshigoe, Y. Teraoka
収録刊行物
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- Appl. Phys. Lett. Vol.91
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Appl. Phys. Lett. Vol.91 33504-, 2007
