[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams

Bibliographic Information

Title
Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams
Author
M. Tagawa, K. Yokota, C. Sogo, A. Yoshigoe, Y. Teraoka

Journal

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Details

  • CRID
    1010000782466366226
  • Article Type
    journal article
  • Data Source
    • KAKEN

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