Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams
Bibliographic Information
- Title
- Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams
- Author
- M. Tagawa, K. Yokota, C. Sogo, A. Yoshigoe, Y. Teraoka
Journal
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- Appl. Phys. Lett. Vol.91
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Appl. Phys. Lett. Vol.91 33504-, 2007
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Details
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- CRID
- 1010000782466366226
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- Article Type
- journal article
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- Data Source
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- KAKEN