Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams

Bibliographic Information

Title
Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams
Author
M. Tagawa, K. Yokota, C. Sogo, A. Yoshigoe, Y. Teraoka

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Details 詳細情報について

  • CRID
    1010000782466366226
  • Article Type
    journal article
  • Data Source
    • KAKEN

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