Electrical Characteristics and Zirconia Film Preparation by a Zirconium-Oxygen Plasma using a Positively Biased Electrode

Bibliographic Information

Title
Electrical Characteristics and Zirconia Film Preparation by a Zirconium-Oxygen Plasma using a Positively Biased Electrode
Author
行村建, 明石周平, 須田善行, Xinxin Ma, 池畑隆

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Details 詳細情報について

  • CRID
    1010000782485149213
  • Article Type
    journal article
  • Data Source
    • KAKEN

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