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Fast growth of carbon nanowalls from pure methane using helicon plasma-enhanced chemical vapor deposition
Bibliographic Information
- Title
- Fast growth of carbon nanowalls from pure methane using helicon plasma-enhanced chemical vapor deposition
- Author
- Genta Sato
Journal
-
- Japanese Journal of Applied Physics 45
-
Japanese Journal of Applied Physics 45 5210-5212, 2006
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Details 詳細情報について
-
- CRID
- 1010282256597324059
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
