Fast growth of carbon nanowalls from pure methane using helicon plasma-enhanced chemical vapor deposition
書誌事項
- タイトル
- Fast growth of carbon nanowalls from pure methane using helicon plasma-enhanced chemical vapor deposition
- 著者
- Genta Sato
収録刊行物
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- Japanese Journal of Applied Physics 45
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Japanese Journal of Applied Physics 45 5210-5212, 2006