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Fabrication and Properties of Ultra Small Si Wire Arrays with Circuits by Vapor-Liquid-Solid Growth
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- TAKAO Hidekuni
- Toyohashi University of Technology, Faculty of Engineering, Associate
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- SAWADA Kazuaki
- Toyohashi University of Technology, Faculty of Engineering, Associate Professor
Bibliographic Information
- Title
- Fabrication and Properties of Ultra Small Si Wire Arrays with Circuits by Vapor-Liquid-Solid Growth
- Author
- Takeshi Kawano, Yoshiko Kato, Masato Futagawa, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
Journal
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- Sensors and Actuators A 97-98
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Sensors and Actuators A 97-98 709-715, 2002
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Details 詳細情報について
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- CRID
- 1010282256753445504
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- Article Type
- journal article
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- Data Source
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- KAKEN
