Deposition of highly stable a-Si:H films using cluster-eliminating filter
Bibliographic Information
- Title
- Deposition of highly stable a-Si:H films using cluster-eliminating filter
- Author
- Kazunori Koga, Naoto Kaguchi, Kouki Bando, Masaharu Shiratani, Yukio Watanabe
Journal
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- Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing
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Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing 157-158, 2005
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Details 詳細情報について
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- CRID
- 1010282256753462146
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- Article Type
- journal article
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- Data Source
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- KAKEN