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Comparison of organic and hydride group V precursors in terms of surface kinetics in wide-gap selective area metalorganic vapor phase epitaxy
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- SUGIYAMA Masakazu
- The University of Tokyo, Graduate School of Engineering, Lecturer
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- NAKANO Yoshiaki
- The University of Tokyo, Research Center for Advanced Science and Technology, Professor
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- 霜垣 幸浩
- 東京大学
Bibliographic Information
- Title
- Comparison of organic and hydride group V precursors in terms of surface kinetics in wide-gap selective area metalorganic vapor phase epitaxy
- Author
- Ho-Jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
Journal
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- Japanese Journal of Applied Physics vol.42, part 2, no.10A
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Japanese Journal of Applied Physics vol.42, part 2, no.10A 2003
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Details 詳細情報について
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- CRID
- 1010282256753485709
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- Article Type
- journal article
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- Data Source
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- KAKEN
