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Effect of temperature and substrate misorientation on the surface reaction kinetics of selective area MOVPE
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- SUGIYAMA Masakazu
- The University of Tokyo, Graduate School of Engineering, Lecturer
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- NAKANO Yoshiaki
- The University of Tokyo, Research Center for Advanced Science and Technology, Professor
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- 霜垣 幸浩
- 東京大学
Bibliographic Information
- Title
- Effect of temperature and substrate misorientation on the surface reaction kinetics of selective area MOVPE
- Author
- Haizheng Song, Xueliang Song, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
Journal
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- Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-17
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Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-17 1-4, 2005
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Details 詳細情報について
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- CRID
- 1010282256753485862
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- Article Type
- journal article
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- Data Source
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- KAKEN