High-speed precision-surface profilometry using large phase shifting
Bibliographic Information
- Title
- High-speed precision-surface profilometry using large phase shifting
- Author
- M.Adachi, K.Ueda
Journal
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- Proceedings of SPIE 5264
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Proceedings of SPIE 5264 322-331, 2003
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Details 詳細情報について
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- CRID
- 1010282256756342788
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- Article Type
- journal article
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- Data Source
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- KAKEN