CuTi合金スパッタ薄膜の機械的特性及び電気抵抗率に及ぼす 時効の効果
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- SAKURAI Junpei
- Tokyo Institute of Technology, Precistion and intelligence laboratory, Assistant Professor
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- HATA Seiichi
- Tokyo Institute of Technology, Frontier Collaborative Research Center, Associate Professor
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- SHIMOKOHBE Akira
- Tokyo Institute of Technology, Precistion and intelligence laboratory, Professor
Bibliographic Information
- Title
- CuTi合金スパッタ薄膜の機械的特性及び電気抵抗率に及ぼす 時効の効果
- Author
- 桜井淳平, 秦 誠一, 下河辺明
Journal
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- 日本金属学会講演概要
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日本金属学会講演概要 541-, 2003
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Details
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- CRID
- 1010282256778087556
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- Article Type
- journal article
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- Data Source
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- KAKEN