Pendio epitaxial growth of 3C-SiC on Si substrates

Bibliographic Information

Title
Pendio epitaxial growth of 3C-SiC on Si substrates
Author
A.Shoji, M.Nakamura, K.Mitikami, T.Isshiki, S.Ohshima, S.Nishino

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Details

  • CRID
    1010282256781784971
  • Article Type
    journal article
  • Data Source
    • KAKEN

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