A Basic Study on CMP Mechanism and a Trial to produce CMP Slurry by Sol-gel Method
Bibliographic Information
- Title
- A Basic Study on CMP Mechanism and a Trial to produce CMP Slurry by Sol-gel Method
- Author
- J.SHIBATA, M.OHTA, A.Oda
Journal
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- Advances in Abrasive Technology -7^<th> International Symposium in Abrasives
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Advances in Abrasive Technology -7^<th> International Symposium in Abrasives 389-392, 2004
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Details 詳細情報について
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- CRID
- 1010282256789385217
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- Article Type
- journal article
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- Data Source
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- KAKEN