Importance of lattice-matching and surface arrangement for the helicon-wave-excited-plasma sputtering epitaxy of ZnO
Bibliographic Information
- Title
- Importance of lattice-matching and surface arrangement for the helicon-wave-excited-plasma sputtering epitaxy of ZnO
- Author
- T.Koyama, S.F.Chichibu
Journal
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- Journal of Applied Physics 95(12)
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Journal of Applied Physics 95(12) 7856-7861, 2004
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Details 詳細情報について
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- CRID
- 1010282256795091585
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- Article Type
- journal article
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- Data Source
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- KAKEN