Plasma anisotropic CVD of high purity Cu using Cu(hfac)_2
Bibliographic Information
- Title
- Plasma anisotropic CVD of high purity Cu using Cu(hfac)_2
- Author
- Masaharu Shiratani, Takao Kaji, Kazunori Koga, Yukio Wtanabe, Tomohiro Kubota, Seiji Samukawa
Journal
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- Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing
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Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing 119-120, 2006
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Details
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- CRID
- 1010282256851295497
-
- Article Type
- journal article
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- Data Source
-
- KAKEN
