Plasma anisotropic CVD of high purity Cu using Cu(hfac)_2
書誌事項
- タイトル
- Plasma anisotropic CVD of high purity Cu using Cu(hfac)_2
- 著者
- Masaharu Shiratani, Takao Kaji, Kazunori Koga, Yukio Wtanabe, Tomohiro Kubota, Seiji Samukawa
収録刊行物
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- Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing
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Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing 119-120, 2006