UV Induced Refractive Index Change of SiN Film and Its Application to Center Wavelangth Trimming of Vertically
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- KOKUBUN Yasuo
- Yokohama National University, Faculty of Engineering, Professor
Bibliographic Information
- Title
- UV Induced Refractive Index Change of SiN Film and Its Application to Center Wavelangth Trimming of Vertically
- Author
- Toshiki Naganawa, Hirofumi Haeiwa, Yasuo Kokubun
Journal
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- Jpn.J.Applied Physics Vol.43,No.12
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Jpn.J.Applied Physics Vol.43,No.12 5780-5784, 2004
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Details 詳細情報について
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- CRID
- 1010282256851322261
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- Article Type
- journal article
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- Data Source
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- KAKEN