Reactive sputter deposition of AlInN thin films
Bibliographic Information
- Title
- Reactive sputter deposition of AlInN thin films
- Author
- Q.X.Guo, Y.Okazaki, Y.Kume, T.Tanaka, M.Nishio, H.Ogawa
Journal
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- Journal of Crystal Growth 300
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Journal of Crystal Growth 300 151-154, 2007
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Details
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- CRID
- 1010282256858939525
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- Article Type
- journal article
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- Data Source
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- KAKEN