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Reactive sputter deposition of AlInN thin films
Bibliographic Information
- Title
- Reactive sputter deposition of AlInN thin films
- Author
- Q.X.Guo, Y.Okazaki, Y.Kume, T.Tanaka, M.Nishio, H.Ogawa
Journal
-
- Journal of Crystal Growth 300
-
Journal of Crystal Growth 300 151-154, 2007
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Details 詳細情報について
-
- CRID
- 1010282256858939525
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN