Reactive sputter deposition of AlInN thin films

Bibliographic Information

Title
Reactive sputter deposition of AlInN thin films
Author
Q.X.Guo, Y.Okazaki, Y.Kume, T.Tanaka, M.Nishio, H.Ogawa

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Details

  • CRID
    1010282256858939525
  • Article Type
    journal article
  • Data Source
    • KAKEN

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