Nitrogen concentration and thermal behavior characterized by infrared absorption spectroscopy
Bibliographic Information
- Title
- Nitrogen concentration and thermal behavior characterized by infrared absorption spectroscopy
- Author
- N.Inoue, M.Nakatsu, K.Tanahashi, H.Yamada-Kaneta, H.Ono
Journal
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- Silicon technology (in Japanese) No.68
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Silicon technology (in Japanese) No.68 35-38, 2005
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Details
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- CRID
- 1010282256858942600
-
- Article Type
- journal article
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- Data Source
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- KAKEN