Nitrogen concentration and thermal behavior characterized by infrared absorption spectroscopy
書誌事項
- タイトル
- Nitrogen concentration and thermal behavior characterized by infrared absorption spectroscopy
- 著者
- N.Inoue, M.Nakatsu, K.Tanahashi, H.Yamada-Kaneta, H.Ono
収録刊行物
-
- Silicon technology (in Japanese) No.68
-
Silicon technology (in Japanese) No.68 35-38, 2005
