[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals

Bibliographic Information

Title
Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals
Author
N.Inoue, K.Masumoto, M.Shinomiya, K.Kashima, K.Eifuku, M.Koizumi, T.Takahashi, T.Takenawa, A.Karen, K.Shingu, H.Yagi

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Details

  • CRID
    1010282256858942610
  • Article Type
    journal article
  • Data Source
    • KAKEN

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