Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
書誌事項
- タイトル
- Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
- 著者
- Kosuke TAKENAKA
収録刊行物
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- Japanese Journal of Applied Physics 45・10B
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Japanese Journal of Applied Physics 45・10B 8046-8049, 2006