[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units

Bibliographic Information

Title
Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
Author
Kosuke TAKENAKA

Journal

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Details

  • CRID
    1010282256865257600
  • Article Type
    journal article
  • Data Source
    • KAKEN

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