Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
Bibliographic Information
- Title
- Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
- Author
- Kosuke TAKENAKA
Journal
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- Japanese Journal of Applied Physics 45・10B
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Japanese Journal of Applied Physics 45・10B 8046-8049, 2006
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Details
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- CRID
- 1010282256865257600
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- Article Type
- journal article
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- Data Source
-
- KAKEN
