Properties of metal doped tungsten oxide thin films for NO_x gas sensors grown by PLD method combined with sputtering process
書誌事項
- タイトル
- Properties of metal doped tungsten oxide thin films for NO_x gas sensors grown by PLD method combined with sputtering process
- 著者
- Hiroharu Kawasaki
収録刊行物
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- Sensors and Actuators B : Chemical 100
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Sensors and Actuators B : Chemical 100 4-, 2004