Vacuum vapor deposition of PFPE molecules on CHx, CHxNy and CHxFy amorphous carbon surface
書誌事項
- タイトル
- Vacuum vapor deposition of PFPE molecules on CHx, CHxNy and CHxFy amorphous carbon surface
- 著者
- M. Kawaguchi, J. Choi, T. Kato
収録刊行物
-
- Microsystem Technologies 13,8-10
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Microsystem Technologies 13,8-10 1432-1437, 2007