[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography

Bibliographic Information

Title
Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography
Author
Inho, Song, R., Smruti, Mohanty, Masato, Watanabe, Toru, Kawamura, Akitoshi, Okino, Kazuhiko, Horioka, Eiki, Hotta

Journal

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Details

  • CRID
    1010282256906973456
  • Article Type
    journal article
  • Data Source
    • KAKEN

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