Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals
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- TERAI Yoshikazu
- Osaka University
Bibliographic Information
- Title
- Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals
- Author
- A., Imai, S., Kunimatsu, K., Akiyama, Y., Terai, Y., Maeda
Journal
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- Thin Solid Films 515
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Thin Solid Films 515 8162-8165, 2007
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Details 詳細情報について
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- CRID
- 1010282256909999240
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- Article Type
- journal article
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- Data Source
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- KAKEN