Control of β-FeSi_2/Si interface structure by Cu layer
Bibliographic Information
- Title
- Control of β-FeSi_2/Si interface structure by Cu layer
- Author
- K., Akiyama, M., Itakura, S., Kaneko, H., Funakubo, Y., Maeda
Journal
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- Thin Solid Films 515
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Thin Solid Films 515 8144-8148, 2007
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Details 詳細情報について
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- CRID
- 1010282256909999245
-
- Article Type
- journal article
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- Data Source
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- KAKEN