Development of Mgsio_3 Biocompatible Piezoelectric Film for Bio-MEMS Actuator
Bibliographic Information
- Title
- Development of Mgsio_3 Biocompatible Piezoelectric Film for Bio-MEMS Actuator
- Author
- MAEDA, K, UENOYA, T, TSUCHIYA, K, UETSUJI, Y, NAKAMACHI,E
Journal
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- Proc.of SPIE Conference 6415・26
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Proc.of SPIE Conference 6415・26 49-, 2006
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Details
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- CRID
- 1010282256910096029
-
- Article Type
- journal article
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- Data Source
-
- KAKEN
