Development of Mgsio_3 Biocompatible Piezoelectric Film for Bio-MEMS Actuator
書誌事項
- タイトル
- Development of Mgsio_3 Biocompatible Piezoelectric Film for Bio-MEMS Actuator
- 著者
- MAEDA, K, UENOYA, T, TSUCHIYA, K, UETSUJI, Y, NAKAMACHI,E
収録刊行物
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- Proc.of SPIE Conference 6415・26
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Proc.of SPIE Conference 6415・26 49-, 2006