Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space
書誌事項
- タイトル
- Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space
- 著者
- Kaoru, Sato, et. al.
収録刊行物
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- Proceedings of SPIE Vol.6379
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Proceedings of SPIE Vol.6379 2006