Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space
Bibliographic Information
- Title
- Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space
- Author
- Kaoru, Sato, et. al.
Journal
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- Proceedings of SPIE Vol.6379
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Proceedings of SPIE Vol.6379 2006
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Details
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- CRID
- 1010282256910297103
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- Article Type
- journal article
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- Data Source
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- KAKEN