[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Precise atomic force microscopy by suppression of spurious vibration of ferroelectric material and devices

  • TSUJI Toshihiro
    Tohoku University, Graduate School of Engineering, Research Associate

Bibliographic Information

Title
Precise atomic force microscopy by suppression of spurious vibration of ferroelectric material and devices
Author
Toshihiro Tsuji, Kentaro Kobari, Seishiro Ide, Kazushi Ymanaka

Journal

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Details

  • CRID
    1010282256918480140
  • Article Type
    journal article
  • Data Source
    • KAKEN

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