Precise atomic force microscopy by suppression of spurious vibration of ferroelectric material and devices
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- TSUJI Toshihiro
- Tohoku University, Graduate School of Engineering, Research Associate
Bibliographic Information
- Title
- Precise atomic force microscopy by suppression of spurious vibration of ferroelectric material and devices
- Author
- Toshihiro Tsuji, Kentaro Kobari, Seishiro Ide, Kazushi Ymanaka
Journal
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- Proceedings of Piezoelectric Materials & Devices Symposium2006
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Proceedings of Piezoelectric Materials & Devices Symposium2006 3-4, 2006
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Details
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- CRID
- 1010282256918480140
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- Article Type
- journal article
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- Data Source
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- KAKEN