Precise atomic force microscopy by suppression of spurious vibration of ferroelectric material and devices
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- 辻 俊宏
- 東北大学
書誌事項
- タイトル
- Precise atomic force microscopy by suppression of spurious vibration of ferroelectric material and devices
- 著者
- Toshihiro Tsuji, Kentaro Kobari, Seishiro Ide, Kazushi Ymanaka
収録刊行物
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- Proceedings of Piezoelectric Materials ＆ Devices Symposium2006
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Proceedings of Piezoelectric Materials ＆ Devices Symposium2006 3-4, 2006