Surface modification of silicon with sinerle ion irradiation
Bibliographic Information
- Title
- Surface modification of silicon with sinerle ion irradiation
- Author
- I.Ohdomari, T.Kamioka
Journal
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- Appl. Surf. Sci. (submitted)
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Appl. Surf. Sci. (submitted)
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Details 詳細情報について
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- CRID
- 1010282256967532420
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- Article Type
- journal article
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- Data Source
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- KAKEN